To realize the detection of fingertip touch in human-computer interaction and other fields

a flexible tactile sensing array is designed for three-dimensional(3D)force measurement based on the capacitive principle.Polydimethylsiloxane(PDMS)is used as the intermediate support material of the sensing array

polyimide(PI)is used as the flexible substrate to deposit metal electrode patterns

and metallic gold is deposited on the electrode surface to enhance the conductivity.The three-dimensional flexible tactile sensing array has a simple preparation process

and the test results show that it can detect a normal force of 0~30N and a tangential force of 0~10N.The maximum deviation of the sensing unit is measured to be 2.8%

and the maximum drift is 5.6%.The designed acquisition system can simultaneously acquire 6 sensing arrays with 240 channels of data and a response time of 11ms.The sensing array is flexible and versatile

with a large range

enabling it to be applied to robotic tactile sensing.