[1]孔德义,余兵,梅涛,虞承端.常温静电封接技术的研究与实验尝试[J].传感器技术,1995(04):10-12.

The Research and Experiment of Room Temperature Anodic Bonding[J]. 1995, (4).

[1]孔德义,余兵,梅涛,虞承端.常温静电封接技术的研究与实验尝试[J].传感器技术,1995(04):10-12. DOI：

The Research and Experiment of Room Temperature Anodic Bonding[J]. 1995, (4). DOI：